dor_id: 45866

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351.#.#.b: Journal of Applied Research and Technology

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856.4.0.u: https://jart.icat.unam.mx/index.php/jart/article/view/18/18

100.1.#.a: Baig, Mirza Khurram; Atiq, Shahid; Bashir, Shazia; Riaz, Saira; Naseem, Shahzad; Soleimani, Hassan; Yahya, Noorhana

524.#.#.a: Baig, Mirza Khurram, et al. (2016). Pulsed laser deposition of SmCo thin films for MEMS applications. Journal of Applied Research and Technology; Vol. 14 Núm. 5. Recuperado de https://repositorio.unam.mx/contenidos/45866

245.1.0.a: Pulsed laser deposition of SmCo thin films for MEMS applications

502.#.#.c: Universidad Nacional Autónoma de México

561.1.#.a: Instituto de Ciencias Aplicadas y Tecnología, UNAM

264.#.0.c: 2016

264.#.1.c: 2016-10-01

653.#.#.a: Pulsed laser; SmCo; Thin films; MEMS

506.1.#.a: La titularidad de los derechos patrimoniales de esta obra pertenece a las instituciones editoras. Su uso se rige por una licencia Creative Commons BY-NC-SA 4.0 Internacional, https://creativecommons.org/licenses/by-nc-sa/4.0/legalcode.es, para un uso diferente consultar al responsable jurídico del repositorio por medio del correo electrónico gabriel.ascanio@icat.unam.mx

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041.#.7.h: eng

520.3.#.a: Thin films and coatings of permanent magnetic materials have found extensive applications in a wide range of technological domains. SmCo thin films show tremendous potential for use as permanent magnetic films on account of their high anisotropy fields, moderately high saturation magnetization and high curie temperature. In the present research, SmCo thin films have been deposited on single crystal Si(1 0 0) substrates using pulsed laser deposition technique. The films were deposited at a fixed substrate temperature of 400?C by varying the number of pulses, in order to get thin films of different thicknesses. Effect of laser pulses on the crystal structure evolution, composition of the deposited material, film thicknesses and hence the magnetic properties have been investigated. X-ray diffraction analysis was performed in order to determine the crystal structure of the deposited films. The compositional analysis was performed by using energy dispersive X-ray spectroscopy. A slight variation in the Sm and Co contents was observed in the thin films grown by varying the laser shots. The microstructural information of the thin films was obtained by using a scanning electron microscope. The magnetic and electrical parameters were investigated by using vibrating sample magnetometer and two point probe respectively. The results show hard magnetic and conducting nature of all deposited thin films except sample 1 due to poor crystallinity.

773.1.#.t: Journal of Applied Research and Technology; Vol. 14 Núm. 5

773.1.#.o: https://jart.icat.unam.mx/index.php/jart

022.#.#.a: ISSN electrónico: 2448-6736; ISSN: 1665-6423

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264.#.1.b: Instituto de Ciencias Aplicadas y Tecnología, UNAM

doi: https://doi.org/10.22201/icat.16656423.2016.14.5.18

harvesting_date: 2023-11-08 13:10:00.0

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Artículo

Pulsed laser deposition of SmCo thin films for MEMS applications

Baig, Mirza Khurram; Atiq, Shahid; Bashir, Shazia; Riaz, Saira; Naseem, Shahzad; Soleimani, Hassan; Yahya, Noorhana

Instituto de Ciencias Aplicadas y Tecnología, UNAM, publicado en Journal of Applied Research and Technology, y cosechado de Revistas UNAM

Licencia de uso

Procedencia del contenido

Cita

Baig, Mirza Khurram, et al. (2016). Pulsed laser deposition of SmCo thin films for MEMS applications. Journal of Applied Research and Technology; Vol. 14 Núm. 5. Recuperado de https://repositorio.unam.mx/contenidos/45866

Descripción del recurso

Autor(es)
Baig, Mirza Khurram; Atiq, Shahid; Bashir, Shazia; Riaz, Saira; Naseem, Shahzad; Soleimani, Hassan; Yahya, Noorhana
Tipo
Artículo de Investigación
Área del conocimiento
Ingenierías
Título
Pulsed laser deposition of SmCo thin films for MEMS applications
Fecha
2016-10-01
Resumen
Thin films and coatings of permanent magnetic materials have found extensive applications in a wide range of technological domains. SmCo thin films show tremendous potential for use as permanent magnetic films on account of their high anisotropy fields, moderately high saturation magnetization and high curie temperature. In the present research, SmCo thin films have been deposited on single crystal Si(1 0 0) substrates using pulsed laser deposition technique. The films were deposited at a fixed substrate temperature of 400?C by varying the number of pulses, in order to get thin films of different thicknesses. Effect of laser pulses on the crystal structure evolution, composition of the deposited material, film thicknesses and hence the magnetic properties have been investigated. X-ray diffraction analysis was performed in order to determine the crystal structure of the deposited films. The compositional analysis was performed by using energy dispersive X-ray spectroscopy. A slight variation in the Sm and Co contents was observed in the thin films grown by varying the laser shots. The microstructural information of the thin films was obtained by using a scanning electron microscope. The magnetic and electrical parameters were investigated by using vibrating sample magnetometer and two point probe respectively. The results show hard magnetic and conducting nature of all deposited thin films except sample 1 due to poor crystallinity.
Tema
Pulsed laser; SmCo; Thin films; MEMS
Idioma
eng
ISSN
ISSN electrónico: 2448-6736; ISSN: 1665-6423

Enlaces